WORLDEX

Silicon

Our company’s flagship products are silicon-parts for semiconductors which are mainly used for etching processes in the entire semiconductor process.
Our key products include Electrodes (Cathode, GDP (Gas Distribution Plates), GSP (Gas Shower Plates, etc.) and Rings.

Production and Sales System

Our company established an Integrated Production System which enables Worldex to process more than 90% of Ingots manufactured by WCQ into Si-parts.
These Si-parts are then supplied to the domestic and Chinese market by Worldex, and to the expanding global market including USA, Japan, Singapore, Taiwan, Europe, etc. by our subsidiary, WCQ.

Silicon Ingot

Single Crystal Silicon Ingot Very Large Diameter ingot

Multi-Crystal Silicon “Poly Ingot”

Product Name	Single Crystal Silicon Ingot	Multi-Crystal Silicon “Poly Ingot”
Application	Si Electrode Si Ring Si Parts	Si Ring Si Parts
Characteristic	Single Crystal Silicon Ingot	Poly Ingot
Purity(%)	99.999999999%(11N)	99.9999999%(9N)
Diameter	Ø215~Ø600mm	Customer Specification
Length	1300~400mm	1000~800mm
Direction	<100>, <110>, <111>	Columnar
Type	P type, Boron Doped	P type, Boron Doped
Resistance	0.001~1000 Ω-Cm	0.001~1000 Ω-Cm
Oxygen Content(ppma)	≤ 20 ppma	≤ 20 ppma
Carbon Content(ppma)	≤ 0.3 ppma	≤ 0.3 ppma

Silicon Electrode

Product Name	Silicon Electrode
Product Description	Role of producing Plasma state through Gas Flow
Application	Etcher
Product Type	Si Electrode, Shower Head, Cel Inner
Raw Material	Single Crystal Silicon
External Diameter	Ø600max
Resistance	Low resistance < 0.1ohm.cm General resistance 1~20ohm.cm High resistance 60~90ohm.cm
Electrode Hole	Diameter 0.4~1.0 Roundness Concentricity 0.01
Surface Processing	Etching, Polishing, Lapping, Cleaning
Flatness	0.01
Processing Precision	0.05

Silicon Ring

Product Name	Silicon Ring
Product Description	Role of concentrating Plasma generated from Electrode to correct position
Application	Etcher
Product Type	Role of concentrating Plasma generated from Electrode to correct position
Raw Material	Single Crystal Silicon, Poly Si, CVD SiC
External Diameter	Ø600 Max
Resistance	Low resistance < 0.1ohm.cm General resistance 1~20ohm.cm
Electrode Hole	Diameter Roundness Concentricity error
Surface Processing	Polishing, Lapping, Grinding
Flatness	0.01
Processing Precision	0.05

Silicon others

Silicon Boat

Silicon other parts

Product Name	Silicon Boat	Silicon other parts
Product Description	Container for transporting and storing of wafer in the semiconductor manufacturing process	Wafer, Plate, Pin, Tube, etc.
Application	Used in various semiconductor manufacturing processes including CVD, thermal oxidation and diffusion, and ion injection, etc.	Parts for semiconductor process including Epi, etc.
Type	Vertical and Horizontal types	Customized manufacturing and production